1

Summary Abstract: Laser-controlled plasma etching

Year:
1984
Language:
english
File:
PDF, 410 KB
english, 1984
2

Active mode locking of a XeCl laser

Year:
1981
Language:
english
File:
PDF, 410 KB
english, 1981
3

Wavelength dependence of laser enhanced plasma etching of semiconductors

Year:
1986
Language:
english
File:
PDF, 545 KB
english, 1986